Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting

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Fitting the oxygen O1s core level

There is a few choices to make on the fitting of the O1s level. The level is an s-orbital and thus gives rise to a peak that is symmetric so any non-symmetric appearance must be caused several states of oxygen. The question is then to which states of oxygen they should be attributed. Below are shown the spectra of levels 0 (surface), 11 and 20.

We can establish that

• The main peak remains at fixed binding energy, and
• There is a shoulder at higher binding energy