Specific Process Knowledge/Etch

Choose material to be etched

• Aluminium
• Chromium
• Titanium
• Gold
• Platin
• Polymer
• Silicon
• Silicon Nitride
• Silicon Oxide
• Bulk Glass - Borofloat (pyrex) and fused silica (quartz)

Choose a dry etch equipment

• RIE (Reactive Ion Etch)
• ASE (Advanced Silicon Etch)
• AOE (Advanced Oxide Etch)

Choose a wet etch

• Wet Silicon Nitride Etch
• Wet Silicon Oxide Etch (BHF)
• KOH Etch - Anisotropic silicon etch
• Wet Polysilicon Etch - Isotropic silicon etch
• Wet Polysilicon Etch