Specific Process Knowledge/Wafer Information
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Wafer Information
DTU Nanolab has a stock of standard silicon and glass wafers; the most used of these wafers are located in the wafer cupboard in cleanroom B-1. DTU Danchip seeks always to have new deliveries of wafers on stock. They will be available when the previous delivery has been used.
Wafers available in DTU Nanolabs cleanroom
A full list of wafers can be found in the wafer shop in Labmanager. The typical specs of our standard wafers are listet below:
| Wafers available in the cleanroom | |||||
| Size | Type | Thickness | Resistivity | ||
|---|---|---|---|---|---|
| SSP (single side polished) | 2" | P | 500 µm | 1-20 Ωcm | |
| SSP (single side polished) | 4" | N or P | 525 µm | 1-20 Ωcm | |
| SSP (single side polished) | 6" | N | 625 µm | 10-20 Ωcm | |
| SSP (single side polished) | 8" | N | 725 µm | 1-10 Ωcm | |
| DSP (double side polished) | 4" | N or P | 350 µm | 1-20 Ωcm | |
| DSP (double side polished) | 4" | N | 500 µm | 1-20 Ωcm | |
| DSP (double side polished) | 6" | N | 500 µm | 1-20 Ωcm | |
| Fused silica wafers | 4" | 500 µm or 1 mm | |||
| Boron glass wafers | 4" | 500 µm | |||
| pre-processed1 | 4" and 6" | ||||
1 Pre-processed wafers are wafers with various thicknesses or thermal oxides, LPCVD nitrides and Poly Si. Please consult the wafer shop in Labmanager for details.
The name on the wafer boxes consists typically of a few letters and a number, eg OP337:
| waferbox name OP337 | ||
| O | P | 337 |
|---|---|---|
| Indicates the company where the wafers are bought | Type of doping in the wafer | shipment number |
How to buy wafers:
Whenever you want to buy some wafers you login to Labmanager and find the wafer shop. Here you can see a list of wafers that we have on stock. Most of these are in the cupboard. Some of the wafers are stored in our basement and you must always contact a Nanolab personnel for buying these. In the list you can see the specifications, prices as well as a link to a pdf file with more detailed information. Be sure that the wafers you want to buy in the shop are in the cupboard before buying. By buying in the shop the door to the cupboard will unlock for 30 sec and the door can be opened by twisting the handle counter clock wise, leave the door open while taking the wafers you have bought. After taking the number of wafers you have bought place the wafer box back into the cupboard and remember to close the door. This will lock the door again. When taking new wafers always use the dedicated vacuum tweezer hanging on the wall labeled Wafer Shop Tweezer.
If you buy wafers that have to go directly from the new wafer box into any of the LPCVD furnaces or Furnace: Anneal-oxide(C1) buy the numbers of wafers you need minus one. This unlock the door, take the box to the furnace as you close the door to the cupboard behind you, load your wafers into the furnace. Then buy the last wafer for unlocking the cupboard door such that the wafer box can be placed in the cupboard again.
Wafer boxes and single wafer carriers
New clean wafer boxes and single wafer carriers can be found in the gowning area. Ask DTU Nanolab personnel for help if stock is low. If you empty a wafer box from the wafer cupboard you can also keep that, it is considered very clean.