Specific Process Knowledge/Characterization/Hardness measurement

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Hardness measurer

Hardness Measurer. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films.

The user manual, technical information and contact information can be found in LabManager:

Hardness measurer

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness measurer

The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year. The QC procedure

Equipment performance and process related parameters

Purpose	Hardness measurer	Sample thickness Film thickness
Performance	Indent force	0,05N 0,15N
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions (besides sample must be dry and free from chemical residues)