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KPFM (Kelvin Probe Force Microscopy) measurements can be done with this AFM Icon. It is best for mapping the surface potential on a sample with nanometer resolution but it can also be calibrated to give quantitative values.

Here I shortly explain how to calibrate to get work function values:

To get a quantitative value for the work function of a sample material you need to calibrate the AFM tip you are using. This is done by measuring a material with a known work function. We do not have a certified sample for this but we are using a sample that came with the system. it has some lines of Au-Si-Al right next to each other. The below image is from the Bruker application note: AN10-RevA1-PeakForce_KPFM-appNote.pdf

For reference I prefer using the gold as the two other materials form oxides and I think the uncertainty of the values are higher. But even for gold you can find several different values for the work function. Take a look at these references: [1], [11]. The work function value range for gold seems to be from 5.10eV to 5.47eV. 5.10eV for poly crystaline gold and the higher values for