Specific Process Knowledge/Characterization/Probe station

Probe station

Probe station. Positioned in serviceroom CX1

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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.

It has several source meters, multi meters and a computer attached.

Equipment performance and process related parameters

Purpose	Electrical measurements	I/V Resistance Data collection by PC
Performance	Pad size	100x100µm or more
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions

The user manual, technical information and contact information can be found in LabManager:

Probe station