Specific Process Knowledge/Characterization/Thickness Measurer

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Thickness measurer

Hardness Measurer. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films.

The user manual, technical information and contact information can be found in LabManager:

Hardness measurer

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the Thickness measurer

The measured standard thickness is 0.1 mm. The QC is performed x times a year. The QC procedure

Equipment performance and process related parameters

Purpose	Thickness measurer	Wafer thickness Depths of larger grooves Heigth of larger mesas
Performance	Thickness resolution	< 5 µm
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions