Specific Process Knowledge/Imprinting

From LabAdviser

Choose an equipment

  • MVD - Molecular Vapor Deposition - Antistiction coater for silicon stamps
  • Drop Shape Analyzer - Tool to measure the hydrophobicity of the antistiction layer
  • EVG NIL - Aligner and imprinting tool
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Imprinting&oldid=2527"