Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic

From LabAdviser


Mediumiso
Recipe Step Temperature Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
mediumiso1 - 20 25 0 150 0 0 600 3 1 NA
Isoslow7 10 10 80 150 3 1
-