Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic
| Recipe | Step | Temperature | Time | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| mediumiso1 | - | 20 | NA | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | NA |
| - |
| Recipe | Step | Temperature | Time | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| mediumiso1 | - | 20 | NA | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | NA |
| - |