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Eutectic bonding
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Fusion bonding
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Anodic bonding
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| General description
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For bonding two substrates by use of an interphase that makes an eutecticum.
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For bonding two identical materials.
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For bonding Si and Glass.
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| Bonding temperature
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Depending on the eutecticum 310Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C to 400Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C.
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Depending on defects 50Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C to 400Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C.
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Depending on the voltage 300Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C to 500Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C Standard is 400Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C.
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| Annnealing temperature
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No annealing
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1000Failed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle ^o}
C in the bond furnace C3
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No annealing
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| Materials possible to bond
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Bonding of substrates is done by use of the eutectica Au/Si, Au/Sn and Ni/Si
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Si/Si, SiOFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2}
/SiOFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2}
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Si/Pyrex (glass)
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| Substrate size
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Up to 6" (aligning only possible for 4" and 6")
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Up to 6" (aligning only possible for 4" and 6")
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Up to 6" (aligning only possible for 4" and 6")
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| Cleaning
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Cleaning by N2.
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Wet chemical cleaning, IMEC.
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Cleaning by N2.
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