Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ALD multilayers

From LabAdviser

This page describes non standart recipes including multilayers structures.

Low temperature deposition of Al2O3

Recipe: Al2O3LT

Temperature:80-150C

Low temperature deposition of TiO2

Recipe: TiO2LT

Temperature: 80-150C

Low temperature grown multilayers on flat surfaces

Recipe: EMA01

Recipe: EMA02

Recipe: EMA03

Recipe: EMA04

Temperature: 120C

Al2O3/TiO2 multilayers on high aspect ratio structures

Recipe: Multi T

Temperature: 150C