Specific Process Knowledge/Etch/Etching of Chromium

From LabAdviser

Etching of Chromium

Fume hood: positioned in cleanroom 2.
Wet Etch of Chromium can take place in a beaker in this fume hood

Etching of chromium is done wet at Danchip making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. We have two solution for this:

  1. HNO:HO:cerisulphate - 90ml:1200ml:15g - standard at Danchip
  2. Commercial chromium etch

Etch rate are depending on the level of oxidation of the metal.


Overview of the data for the chromium etches

Chromium etch 1 Chromium etch 2
General description

Etch of chromium

Etch of chromium

Chemical solution HNO:HO:cerisulphate - 90ml:1200ml:15g Commercial chromium etch

CE 8002-A

Process temperature Room temperature Room temperature
Possible masking materials

Photoresist (1.5 µm AZ5214E)

Photoresist (1.5 µm AZ5214E)

Etch rate

~40-100 nm/min

~10-20 nm/min

Batch size

1-25 wafers at a time

1-25 wafer at a time

Size of substrate

4" wafers

4" wafers

Allowed materials

No restrictions. Make a note on the beaker of which materials have been processed.

No restrictions. Make a note on the beaker of which materials have been processed.