Specific Process Knowledge/Characterization/Lifetime scanner MDPmap
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The user manual, control instruction, the user APV and contact information can be found in LabManager:
Lifetime scanner MPDmap info page in LabManager,
Performance information
| Equipment | ||
|---|---|---|
| Purpose | ||
| Location | ||
| Performance | Resolution | |
| Instrument specifics | Detector | |
| Stage | ||
| Electron source | ||
| Operating pressures | ||
| Options | ||
| Substrates | Batch size |
|
| Allowed materials |
| |