Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Crystal Settings

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How to calculate the tooling factor. Taken from the manufacture manual

Material parameters for calculating the tooling factor
Material	Density	Z ratio
TiO2	4.260	0.400
SiO2	2.648	1.000
Si	2.320	0.712

Settings for Crystal thickness monitor 1
Date	Tooling factor: TiO2	Tooling factor: SiO2	Tooling factor: Si
22-7-2014	1.573 (wafer center)
B	B1	B2	B3
C	C1	C2	C3
D	D1	D2	D3

Settings for Crystal thickness monitor 2
Date	Tooling factor: TiO2	Tooling factor: SiO2	Tooling factor: Si
A	A1	A2	A3
B	B1	B2	B3
C	C1	C2	C3
D	D1	D2	D3