Specific Process Knowledge/Wafer cleaning/IMEC

From LabAdviser

IMEC process for cleaning of wafers before fusion bonding:

Ophav IMEC Spørg Karen om der er lavet modificeringer

Step Process Details Comments Comments
1 Pre-bond cleaning of Si wafers prior to fusion bonding.
  • Takes 1½ hours
  • Orient flat to minimize handling
  • Preferable done just before bonding!
Get CLEAN box for wafers!!!
2 Piranha Mixture: H2SO4:H2O2 (4:1)

Temp: 80 oC Time: 5 min (a yellow and a black spot)

Clean tank (cleanroom 4, 7-up bath for wafers) and make your own or make in dedicated glass.

Pour up H2SO4 first, put wafers in carrier (USE this in steps4.1-4.6), add H2O2, wait 30 sec, dip wafers.

Maybe clean the tank the day before!
3 Rinse 2 min. rinse Put into dedicated wet box for IMEC
4 IMEC DI water:5% HF:isopropanol (100:10:1)

Temp: 25 oC Time: 100 sec (two black spots)

Clean tank (cleanroom 4, tank for buffer with wetting solution) and make your own. Mix in dedicated bottle (IMEC) in fume hood and add to tank using BHF pump from RCA fumehood!

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5 Rinse 2 min. rinse Put into dedicated wet box for IMEC .
6 Piranha Not nitride wafers!

Mixture: H2SO4:H2O2 (4:1) Temp: 80 oC Time: 20 min

Re-use previous piranha

Makes wafers hydrophilic

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7 Rinse & spin dry 5 min rinse . .
8 Put wafers in new clean carrier box . . .