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An overview of the performance of the AFM: Nanoman

Equipment		Nanoman
Purpose	Topografic measurement in the nanometer and and sub-micrometer regime	Surface roughness measurement Step/structure hight measurement Surface image
Performance	Scan range xy	Up to 90 µm square
	Scan range z	1 µm (can go up to 6µm with special settings)
	Resolution xy	Down to 1.4 nm - accuracy better than 2%
	Resolution z	<1 Å - accuracy better than 2%
	Max. scan depth as a function of trench width W	~1 for our standard probe. Can be improved to about 10 with the right probe
Hardware settings	Tip radius of curvature	Standard probe: <12 nm
	Standard Cantilevers/tips	Tap300Al-G
	Super Sharp Si Cantilever/tip	SSS-NCHR
	High Aspect Ratio Cantilever/tip	AR5-NCHR
	Cantilevers/tips vendor	www.nanoandmore.com
Substrates	Substrate size	Up to 6"
	Substrate material allowed	In principle all materials