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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange

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< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus

Revision as of 12:07, 10 December 2014 by Jmli (talk | contribs)

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**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Wafer ID	Comment	SEM images	Wafer ID	Comment	SEM images
15 minutes of black silicon recipe on blank wafer	S004592	Wafer centre		S004679	Wafer centre
15 minutes of black silicon recipe on blank wafer	S004592	Wafer edge		S004679	Wafer edge

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