Specific Process Knowledge/Direct Structure Definition
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Direct Structure Definiton
By direct structure definition we mean that you form the structures for you device directly in the material that the device consist of without any masking steps.
Advantages of direct structure definition may be ..
- Quicker process because no need for masking steps
- In some cases the structure is defined directly by a computer, so changes in the design can be made very quickly.
Dis-advantages could be
- Limited choice of materials
- Limited resolution
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Choose method of structuring
Materials for structuring
- Polymers
- SU-8
- Topas
- ...
- Metals
- Silicon
- Glass