Specific Process Knowledge/Lithography/mrEBL6000

From LabAdviser
Resist Polarity Manufacturer Comments Technical reports Spinner Developer Rinse Remover Process flows (in docx-format)
mr EBL 6000 Positive MicroResist Standard negative resist mrEBL6000 processing Guidelines.pdf‎ Manual Spinner 1 (Laurell), Spin Coater Labspin mr DEV IPA Process_Flow_mrEBL6000.docx‎
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