Specific Process Knowledge/Lithography/mrEBL6000

From LabAdviser
Resist Polarity Manufacturer Comments Technical reports Spinner Developer Rinse Remover Process flows (in docx-format)
mr EBL 6000 Positive MicroResist Standard negative resist CSAR_62_and_process_chemicals.pdf‎, CSAR_62_Abstract_Allresist.pdf‎ Manual Spinner 1 (Laurell), Spin Coater Labspin mr DEV IPA Process_Flow_CSAR.docx‎
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/mrEBL6000&oldid=15646"