Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence
Fluence
The fluence produces by a laser is, by definition, the energy delivered by a laser pulse () per surface unit () and it is given in J/cm2.
The function is defined as :
Where () is measured with the laser sensor power measurement and the repetion rate () is set in the settings.
The fluence is therefore determinate as such :