Specific Process Knowledge/Characterization/Sample imaging

The list of instruments for sample imaging available at Danchip includes 6 optical microscopes , three scanning electron microscopes (SEM's) and an atomic force microscope (AFM). These instruments cover a wide range of applications:

• The optical microscopes

Below is listed some characteristics.

	Optical microscopes	SEM	AFM
Magnification range	25x to 1000x	100x to 500.000x	Maximum scanned area 90x90 µm
Depth of focus	Low	Very high