Specific Process Knowledge/Wafer cleaning/cleaning with HF

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Removal of native oxide is a part of the RCA cleaning procedure. See the RCA page for further details. This bath must only be used during the RCA cleaning procedure or to remove native oxide on new wafers from the box. For removal of oxide of processed wafers that is not getting a full RCA clean the other HF/BHF baths can be used see the oxide etch page.