Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry

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Atomika SIMS

Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).

The Atomika SIMS in Labmanager

The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.

Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.

An overview of the performance of the SIMS

Purpose Determination of atomic composition
  • Doping level
  • Sample contamination
Performance Measurement accuracy depends on
  • Which atoms to be analysed
  • The sample morphology (flat samples are much more suited than particles)
Process parameters
  • Syringe 1: Water (H2O)
  • Syringe 2: Diiodo-methane (I2CH2)
  • Syringe 3: Benzyl alcohol (C6H5CH2OH)
  • Syringe 4: Available
  • Manual dispense is also possible
Sample requirements Substrate material allowed
  • In principle all materials
Substrate size
  • The samples must be cut into 5x5 or 7x7 mm pieces
  • Other types of samples must be mounted onto appropriately sized carriers
Batch size
  • The sample holder carries up to 6 samples at the time
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