Specific Process Knowledge/Thin film deposition/MVD

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The Molecular Vapor Deposition tool

The MVD is located in cleanroom 1

The Applied Microstructures MVD 100 system deposits molecular films on surfaces. These films serve a wide range of purposes ranging from antistiction coatings of nanoimprint lithography stamps to protecting MEMS structures. At Danchip the MVD is essential for nanoimprint lithography.

The user manual, user APV, and contact information can be found in LabManager

Process information

Equipment performance and process related parameters