Specific Process Knowledge/Etch/Etching of Aluminium

From LabAdviser

Etching of Aluminium

Etching of aluminium is done wet at Danchip. We have two different solutions:

  1. HFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2} O:HFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _3} POFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _4} 1:2 at 50 oC
  2. Pre-mixed etch solution: PES 77-19-04 at 20 oC
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