Specific Process Knowledge/Thermal Process/Oxidation

The thickness and the time it takes to grow the oxide often decides if a dry or wet oxidation is choosen.

Dry oxide is used from 5nm - 200nm. Furnace:A1,A3,C1,C2,C3.

Wet oxide with O2 and H2: Furnace:A1,A3.

Wet oxide H2O in a bobler: Furnace:C1,C2,C3.