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Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,146 edits
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!  
!  
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! Aluminium Etch 2
! Aluminium Etch 2
|-  
|-  
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!General description
!General description
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|Etch of aluminium + 1.5% Si
|Etch of aluminium + 1.5% Si
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Link to safety APV and KBA
!Link to safety APV and KBA
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[http://kemibrug.dk/KBA/CAS/106779/?show_KBA=1&portaldesign=1 see KBA here]  
[http://kemibrug.dk/KBA/CAS/106779/?show_KBA=1&portaldesign=1 see KBA here]  
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Chemical solution
!Chemical solution
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4 vol% HNO<sub>3</sub> 70%  
4 vol% HNO<sub>3</sub> 70%  
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|'''Process temperature'''
!Process temperature!
|50 <sup>o</sup>C
|50 <sup>o</sup>C
|20 <sup>o</sup>C
|20 <sup>o</sup>C
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Possible masking materials'''
!Possible masking materials!
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|Photoresist (1.5 µm AZ5214E)
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|'''Etch rate'''
!Etch rate
|~100 nm/min (Pure Al)
|~100 nm/min (Pure Al)
|~60 nm/min
|~60 nm/min
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Batch size'''
!Batch size!
|1-25 wafers at a time
|1-25 wafers at a time
|1-25 wafer at a time
|1-25 wafer at a time
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|'''Size of substrate'''
!Size of substrate
|4" wafers
|4" wafers
|4" wafers
|4" wafers
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Allowed materials'''
!Allowed materials
|
|
*Aluminium
*Aluminium
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