Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
| Line 41: | Line 41: | ||
|H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub> 1:2 | |H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub> 1:2 | ||
|PES 77-19-04 | |PES 77-19-04 | ||
77 vol% Phosphoric acid 85% | |||
77 vol% Phosphoric acid 85% </br> | </br> | ||
19 vol% Acetic acid 100% </br> | 19 vol% Acetic acid 100% | ||
</br> | |||
4 vol% Nitrid acid 70% | 4 vol% Nitrid acid 70% | ||
|- | |- | ||