Specific Process Knowledge/Lithography/Coaters: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
| Line 104: | Line 80: | ||
<br clear="all" /> | <br clear="all" /> | ||
==SSE Spinner== | |||
[[Image:SSEspinner2.jpg|200 × 200px|thumb|The SSE spinner MAXIMUS: positioned in Cleanroom 13.]] | |||
==KS Spinner== | |||
[[Image:KSspinner.JPG|200×200px|right|thumb|The KS spinner is placed in Cleanroom 3.]] | |||
==Manual Spinner( Polymers)== | |||
[[Image:Opticoat.jpg|200×200px|right|thumb|The Manual Spinner(Polymers) is placed in fumehood in Cleanroom 3.]] | |||
==SÜSS Spinner-Stepper== | |||
[[Image:Gamma_2M.jpg|200×200px|right|thumb|The SÜSS Spinner-Stepper is placed in Stepper room.]] | |||