Specific Process Knowledge/Thin film deposition/Electroplating-Ni

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Name of equipment

Write a short description of the equipment(s).

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

Electroplating-Ni positioned in cleanroom 1

LabManager

Process information

Example:

• Description of standard processes

Equipment performance and process related parameters

Equipment		Equipment 1
Purpose		Purpose 1 Purpose 2
Performance	Response 1	Performance range 1 Performance range 2
	Response 2	Performance range
Process parameter range	Parameter 1	Range
	Parameter 2	Range
Substrates	Batch size	# 50 mm wafer # 100 mm wafer # 150 mm wafer
	Allowed materials	Allowed material 1 Allowed material 2