Specific Process Knowledge/Thin film deposition/Electroplating-Ni: Difference between revisions

@@ Line 60: / Line 60: @@
 |style="background:LightGrey; color:black"|Batch size
 |style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki> 50 mm wafer
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki> 100 mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki> 150 mm wafer
-*<nowiki>#</nowiki> 150 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials