Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 32: | Line 32: | ||
50 Å to 1 mm | 50 Å to 1 mm | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution xy | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
down to 0.003 µm | down to 0.003 µm | ||