Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance | !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance | ||
|style="background:LightGrey; color:black"|Scan range | |style="background:LightGrey; color:black"|Scan range x y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Line scan x: 50 µm to 55 mm in a single scan, up to 200 mm with stiching | Line scan x: 50 µm to 55 mm in a single scan, up to 200 mm with stiching | ||
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50 Å to 1 mm | 50 Å to 1 mm | ||
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution x y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
down to 0.003 µm | down to 0.003 µm | ||