Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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<!-- give the link to the equipment info page in LabManager: -->
<!-- give the link to the equipment info page in LabManager: -->
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=299 The Logitech PM5 Polisher/Lapper in LabManager]
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=309 The Laser Micromachining Tool in LabManager]


It is equipped with 2 high power lasers:
It is equipped with 2 high power lasers:

Revision as of 10:35, 7 May 2013

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Laser Micromachining Tool

The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.

It is currently only for internal use by Danchip personel for training.
It will be public available some time during the first half year of 2013.

The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.

The machine is located in the basement of building 346 under the cleanroom.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager:

The Laser Micromachining Tool in LabManager

It is equipped with 2 high power lasers:

  • a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
  • a 100W nanosecond laser with a wavelength of 1064nm.
Lasertool microSTRUCT vario (3D-Micromac AG)

It consist of these main parts:

  • Upper service way
  • Manual front door
  • Operating panel
  • Machine's feet (adjustable)
  • Left service way
  • Electrical cabinet

This shows the interior of the tool with optics, scannerheads and stage.

Inside lasertool