Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)

Etching using the dry etch technique AOE (Advanced oxide etch)

The AOE positioned at DANCHIP is owned by the company Hymite who is a user of the DANCHIP laboratory. The system is free (with charge) to use for every user of the cleanroom but we cannot guarantee this to be the case in the future. The AOE can be used for etching silicon oxide, silicon (oxy)nitride and quartz. Look in the manuals for the AOE to see how to operate the machine (you can find the manuals in LabManager [1]).

Process information

• Etch of Silicon Oxide using AOE

A rough overview of the performance of AOE and some process related parameters

Purpose	Dry etch of	Silicon oxide Silicon (oxy)nitride Quartz
Performance	Etch rates	~0.2-0.6 µm/min
.	Anisotropy	Typical profiles: 86-90 degrees
.	Process pressure	~2-20 mTorr
.	Gas flows	CFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _4} FFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _8} : 0-40 sccm OFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2} : 0-100 sccm CFFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _4} : 0-100 sccm HFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2} : 0-30 sccm He: 0-500 sccm NFailed to parse (SVG (MathML can be enabled via browser plugin): Invalid response ("Math extension cannot connect to Restbase.") from server "https://wikimedia.org/api/rest_v1/":): {\displaystyle _2} : 0-1000 sccm
Substrates	Batch size	1 6" wafer per run (only when the system is setup to 6" 1 4" wafer per run 1 2" wafer per run (needs carrier) Or several smaller pieces (needs carrier)
.	Substrate material allowed	Silicon with layers of silicon oxide or silicon (oxy)nitride Quartz wafers
.	Possible masking material	Photoresist/e-beam resist Silicon/PolySi Aluminium