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Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions

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2,908 edits
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*Process dependent
*Process dependent
*Tested range: ~20nm/min - ~120nm/min  
*Expected range: ~ less than 20nm/min - ~120nm/min  
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*Process dependent
*Process dependent
*Tested range: ~230nm/min - ~550nm/min
*Expected range: ~ less than 230nm/min - ~550nm/min
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*Process dependent
*Process dependent
*Tested once ~22nm/min
*Expected ~10-30 nm/min
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