Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*As many small samples as can be fitted on a 150mm wafer | *As many small samples as can be fitted on a 150mm wafer | ||
*<nowiki>#</nowiki>5 50 mm | *<nowiki>#</nowiki>5 50 mm wafers fitted on a 150mm wafer | ||
*<nowiki>#</nowiki>1 100 mm wafer on a 150mm wafer | *<nowiki>#</nowiki>1 100 mm wafer on a 150mm wafer | ||
*<nowiki>#</nowiki>1 150 mm wafers (The system is normally set up to 150mm) | *<nowiki>#</nowiki>1 150 mm wafers (The system is normally set up to 150mm) | ||