Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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!Substrate size | !Substrate size | ||
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*<nowiki>#</nowiki>25 wafers of 100mm in | *<nowiki>#</nowiki>25 wafers of 100mm in KOH2 | ||
*<nowiki>#</nowiki>1-5 wafers of 100mm or 50mm in "Fumehood KOH" | *<nowiki>#</nowiki>1-5 wafers of 100mm or 50mm in "Fumehood KOH" | ||
*<nowiki>#</nowiki>25 wafers of 100mm or 150mm in | *<nowiki>#</nowiki>25 wafers of 100mm or 150mm in KOH3 | ||
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*<nowiki>#</nowiki>25 100 mm wafers in our 100mm bath | *<nowiki>#</nowiki>25 100 mm wafers in our 100mm bath | ||