Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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*<nowiki>#</nowiki>1 150 mm wafer (only when system is set up for 150 mm wafers) | *<nowiki>#</nowiki>1 150 mm wafer (only when system is set up for 150 mm wafers) | ||
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* | *Several small samples | ||
*<nowiki>#</nowiki>25 50 mm wafers | *<nowiki>#</nowiki>25 50 mm wafers | ||
*<nowiki>#</nowiki>25 100 mm wafers | *<nowiki>#</nowiki>25 100 mm wafers | ||
*<nowiki>#</nowiki>25 150 mm wafer | *<nowiki>#</nowiki>25 150 mm wafer | ||
| | | | ||
* | *Several small samples | ||
*<nowiki>#</nowiki>25 50 mm wafers | *<nowiki>#</nowiki>25 50 mm wafers | ||
*<nowiki>#</nowiki>25 100 mm wafers | *<nowiki>#</nowiki>25 100 mm wafers | ||