Specific Process Knowledge/Thin film deposition: Difference between revisions
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== Choose material to deposit == | == Choose material to deposit == | ||
=== Dielectrica === | |||
*[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''Silicon nitride and silicon oxynitride'' | |||
*[[/Deposition of Silicon Oxide|Silicon Oxide]] | |||
=== Metals/elements === | === Metals/elements === | ||
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===Alloys=== | ===Alloys=== | ||
=== Polymers === | === Polymers === | ||