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Specific Process Knowledge/Thin film deposition: Difference between revisions

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== Choose material to deposit ==
== Choose material to deposit ==
=== Dielectrica ===
*[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''Silicon nitride and silicon oxynitride''
*[[/Deposition of Silicon Oxide|Silicon Oxide]]


=== Metals/elements ===  
=== Metals/elements ===  
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===Alloys===
===Alloys===


=== Dielectrica ===
*[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''Silicon nitride and silicon oxynitride''
*[[/Deposition of Silicon Oxide|Silicon Oxide]]


=== Polymers ===
=== Polymers ===