Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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!'''Allowed materials''' | !'''Allowed materials''' | ||
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In the dedicated bath: | |||
*Silicon | *Silicon | ||
*Silicon Oxide | *Silicon Oxide | ||
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*Photoresist | *Photoresist | ||
*Blue film | *Blue film | ||
In a plastic beaker: | |||
*No limits cross contamination wise | |||
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*Silicon | *Silicon | ||