Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*Isotropic etch | *Isotropic etch | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||
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*Photoresist | *Photoresist | ||
*PolySilicon | *PolySilicon | ||
*Silicon nitride (LPCVD) | |||
*Blue film | *Blue film | ||
*Cr/Au for deeper etches (plastic beaker) | |||
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*Photoresist | *Photoresist | ||