Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions
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*Silicon Nitride | *Silicon Nitride | ||
*Silicon Oxynitride | *Silicon Oxynitride | ||
| | | | ||
*Silicon | *Silicon | ||
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*Silicon Oxynitride | *Silicon Oxynitride | ||
*Photoresist | *Photoresist | ||
*Blue film | |||
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*Silicon | *Silicon | ||
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*Photoresist | *Photoresist | ||
*zep resist | *zep resist | ||
*Aluminium | *Aluminium | ||
*Chromium (try to avoid it) | |||
*Quartz/fused silica | *Quartz/fused silica | ||
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