Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*Anisotropic etch in crystalline silicon | *Anisotropic etch in crystalline silicon | ||
*High selectivity to the {111}-planes | *High selectivity to the {111}-planes | ||
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*Isotropic etch in crystalline Silicon and Polysilicon | *Isotropic etch in crystalline Silicon and Polysilicon | ||