Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*Anisotropic etch: vertical sidewalls independent of the crystal plans | *Anisotropic etch: vertical sidewalls independent of the crystal plans | ||
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*Isotropic etch in Silicon and Polysilicon | *Isotropic etch in crystalline Silicon and Polysilicon | ||
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*Can etch isotropic and anisotropic depending on the process parameters | *Can etch isotropic and anisotropic depending on the process parameters | ||
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*Silicon Oxide | *Silicon Oxide | ||
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*Silicon Nitride | |||
*Silicon Oxide | |||
*Photoresist | *Photoresist | ||
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