Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*The ASE is dedicated to polymer etch, which can affect the Si etch stability. | *The ASE is dedicated to polymer etch, which can affect the Si etch stability. | ||
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*This is dedicated to metal etch | *This is dedicated to metal etch. So fare only Si etch of nanostructures has been explored on the system. | ||
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*Primarily for pure physical etch by sputtering with Ar-ions | *Primarily for pure physical etch by sputtering with Ar-ions | ||