Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions
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**CF<sub>4</sub> | **CF<sub>4</sub> | ||
**SF<sub>6</sub> | **SF<sub>6</sub> | ||
**N<sub>2</sub> | |||
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*The different solvents available at Danchip, such as | *The different solvents available at Danchip, such as | ||