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Specific Process Knowledge/Etch/Etching of Polymer: Difference between revisions

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!Generel description
!General description
|The ASE was originally for deep Si etch but has now been turned into a polymer etcher. It should be used for pattering polymers
|The ASE was originally a dedicated deep Si etcher, but with the arrival of the Pegasus it has now been opened for polymer etching.  
|The plasma asher is good for dry stripping polymers. It can also be used for descum and pattering af polymers.   
|The plasma asher is good for dry stripping polymers. It can also be used for descum and pattering af polymers.   
|The plasma asher is good for dry stripping polymers. It can also be used for descum and pattering af polymers. This plasma asher is for Si wafers without metals.
|The plasma asher is good for dry stripping polymers. It can also be used for descum and pattering af polymers. This plasma asher is for Si wafers without metals.
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